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Semiconductor devices - Micro-electromechanical devices - Part 54: Silicon based MEMS fabrication technology – Measurement method of tensile strength of microstructures
40.99 Full report circulated: DIS approved for registration as FDIS
Semiconductor devices - Micro-electromechanical devices - Part 55: Silicon based MEMS fabrication technology - Test method of microstructure pendulum impact
30.99 CD approved for registration as DIS
Semiconductor devices - Micro-electromechanical systems - Part 57: RF MEMS directional coupler
40.99 Full report circulated: DIS approved for registration as FDIS
Semiconductor devices - Micro-electromechanical systems - Part 58: Test methods for performances of MEMS thermopile devices
40.99 Full report circulated: DIS approved for registration as FDIS
Semiconductor devices - Micro-electromechanical systems - Part 59: Test methods for performances of MEMS multi-orifice balanced differential pressure flowmeter
40.99 Full report circulated: DIS approved for registration as FDIS
Semiconductor devices - Micro-electromechanical systems - Part 60: Test methods for sensing performances of MEMS resonant electric-field-sensitive devices
20.99 WD approved for registration as CD
Semiconductor devices - Micro-electromechanical systems - Part 61: Evaluation methods of localized deformation and stretchability for Hybrid MEMS materials
30.99 CD approved for registration as DIS
Semiconductor devices - Micro-electromechanical systems - Part 62: Electrical resistance test method for hybrid MEMS materials under combined tensile and torsional deformation
30.99 CD approved for registration as DIS
Semiconductor devices - Micro-electromechanical systems - Part 63: Tensile test method for shape-memory characteristics of MEMS materials under thermomechanical loading
30.99 CD approved for registration as DIS
Semiconductor devices - Micro-electromechanical devices - Part 64: Test methods of Terahertz sensing antenna-coupled MEMS bolometer
20.99 WD approved for registration as CD
Semiconductor devices - Micro-electromechanical devices - Part 65: Test methods for electrical stimulation environment and Electrophysiological measurement using 3D Cell-tissues Models with MEMS chips
20.99 WD approved for registration as CD
Semiconductor devices - Micro-electromechanical devices - Part 66: Test method for processing electrophysiological impedance data obtained from 3D cell-tissue models in MEMS chip array-based high-throughput screening systems
20.99 WD approved for registration as CD
Semiconductor devices - Micro-electromechanical devices - Part 67: Microfluidic device for droplet-based 3D cell cultivation
20.99 WD approved for registration as CD
Electricity metering equipment - General requirements, tests and test conditions - Part 11: Metering equipment
40.60 Close of voting
Accuracy test method for static electricity meters under dynamic load conditions
30.60 Close of voting/ comment period
Electricity metering equipment - Particular requirements - Part 21: Static meters for AC active energy (classes 0,5, 1 and 2)
40.60 Close of voting
Electricity metering equipment - Particular requirements - Part 22: Static meters for AC active energy (classes 0,1S, 0,2S and 0,5S)
40.60 Close of voting
Electricity metering equipment - Particular requirements - Part 24: Static meters for fundamental component reactive energy (classes 0,5S, 1S, 1, 2 and 3)
40.60 Close of voting
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