IEC 60204-33:2009 ED1

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

Publication date: 10 dhj 2009

General information

Current stage: 60.60 Effective date: 10 dhj 2009

Originator: IEC

Owner: TC 44

Type: International Standard

ICS: 13.110 25.040.30 29.020

Gjuha: anglisht frëngjisht

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Statusi: Publikuar

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Scope

IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

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PUBLISHED
IEC 60204-33:2009 ED1
60.60 Standard published
10 dhj 2009

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