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IEC 60204-33:2009 ED1

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

Dec 10, 2009

General information

60.60     Dec 10, 2009

IEC

TC 44

International Standard

13.110     25.040.30     29.020  

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Scope

IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

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PUBLISHED
IEC 60204-33:2009 ED1
60.60 Standard published
Dec 10, 2009

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