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ISO 16700:2016

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

Jul 18, 2016

General information

90.93     Nov 23, 2023

ISO

ISO/TC 202/SC 4

International Standard

37.020  

English  

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Scope

ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.

Life cycle

PREVIOUSLY

Revises
ISO 16700:2004

NOW

PUBLISHED
ISO 16700:2016
90.93 Standard confirmed
Nov 23, 2023

REVISED BY

IN_DEVELOPMENT
ISO/PWI 16700

National adoptions

SSH ISO 16700:2016  
DPS

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

60.60 Standard published

DPS/KT 302 more

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