ISO 16700:2016

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

Publication date: Jul 18, 2016

General information

Current stage: 90.93 Effective date: Nov 23, 2023

Originator: ISO

Owner: ISO/TC 202/SC 4

Type: International Standard

ICS: 37.020

Languages: English

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Status: Published

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Scope

ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.