00.00 Nov 23, 2023
ISO
ISO/TC 202/SC 4
International Standard
ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.
Revises
ISO 16700:2016
IN_DEVELOPMENT
ISO/PWI 16700
00.00
Proposal for new project received
Nov 23, 2023
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