ISO/PWI 16700

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

Scope

This document specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material.
This document does not apply to the dedicated critical dimension measurement SEM.