SSH ISO 16700:2016

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

Publication date: Oct 30, 2023

General information

Current stage: 60.60 Effective date: Oct 31, 2023

Next stage: 95.99

Originator: DPS

Owner: DPS/KT 302

Type: International Standard

ICS: 37.020

Languages: English

Buying

Status: Published

PDF - ALL 3,094

Paper - ALL 3,094

CD - ALL 3,094

PDF and Paper - ALL 6,188

Language

Language in which you want to receive the document.

Scope

ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.

Life cycle

PREVIOUSLY

PUBLISHED
SSH ISO 16700:2004

NOW

PUBLISHED
SSH ISO 16700:2016
60.60 Standard published
Oct 31, 2023

SSH ISO 16700:2016

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

General information

Buying

Scope

Life cycle

PREVIOUSLY

NOW

Related project

Adopted from ISO 16700:2016