SSH ISO 16700:2004

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

Publication date: Nov 16, 2016

General information

Current stage: 60.60 Effective date: Jul 12, 2016

Originator: DPS

Owner: DPS/KT 233

Type: International Standard

ICS: 37.020

Languages: English

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Status: Published

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ISO 16700:2004 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.

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PUBLISHED
SSH ISO 16700:2004
60.60 Standard published
Jul 12, 2016

REVISED BY

PUBLISHED
SSH ISO 16700:2016

SSH ISO 16700:2004

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

General information

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Scope

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Adopted from ISO 16700:2004