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SSH ISO 16700:2004

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

Nov 16, 2016

General information

60.60     Jul 12, 2016

DPS

DPS/KT 233

International Standard

37.020  

English  

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Scope

ISO 16700:2004 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.

Life cycle

NOW

PUBLISHED
SSH ISO 16700:2004
60.60 Standard published
Jul 12, 2016

REVISED BY

PUBLISHED
SSH ISO 16700:2016

Related project

Adopted from ISO 16700:2004

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