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ISO 16700:2004

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

Mar 5, 2004
95.99 Withdrawal of Standard   Jul 18, 2016

General information

95.99     Jul 18, 2016

ISO

ISO/TC 202/SC 4

International Standard

37.020  

English  

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Scope

ISO 16700:2004 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.

Life cycle

NOW

WITHDRAWN
ISO 16700:2004
95.99 Withdrawal of Standard
Jul 18, 2016

REVISED BY

PUBLISHED
ISO 16700:2016

National adoptions

SSH ISO 16700:2004  
DPS

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

60.60 Standard published

DPS/KT 233 more