SSH ISO 29301:2017

Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures

Publication date: Oct 30, 2023

General information

Current stage: 60.60 Effective date: Oct 31, 2023

Next stage: 95.99

Originator: DPS

Owner: DPS/KT 302

Type: International Standard

ICS: 37.020

Languages: English

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Status: Published

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Scope

ISO 29301:2017 specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar. This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).

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PUBLISHED
SSH ISO 29301:2017
60.60 Standard published
Oct 31, 2023

Related project

Adopted from ISO 29301:2017

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