ISO 25178-603:2025

Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments

Publication date: 14 shk 2025

General information

Current stage: 60.60 Effective date: 14 shk 2025

Originator: ISO

Owner: ISO/TC 213

Type: International Standard

ICS: 17.040.20

Gjuha: anglisht frëngjisht

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Statusi: Publikuar

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Scope

This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO 25178-603:2013

NOW

PUBLISHED
ISO 25178-603:2025
60.60 Standard published
14 shk 2025

National adoptions

prSSH EN ISO 25178-603:2025

DPS

Specifikime gjeometrike të produktit (GPS) - Struktura e sipërfaqes: Metoda Areal - Pjesa 603 :Karakteristikat nominale të instrumenteve (mikroskopët interferometrik me interval faze) pa kontakt (ISO 25178-603:2025)

40.20 DIS ballot initiated: 12 weeks

DPS/KT 12 më tepër