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ISO 25178-603:2013

Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
25 sht 2013
95.99 Withdrawal of Standard   14 shk 2025

General information

95.99     14 shk 2025

ISO

ISO/TC 213

International Standard

17.040.20  

anglisht   frëngjisht  

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Scope

ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

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NOW

WITHDRAWN
ISO 25178-603:2013
95.99 Withdrawal of Standard
14 shk 2025

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PUBLISHED
ISO 25178-603:2025