Specifikime gjeometrike të produktit (GPS) - Struktura e sipërfaqes: Metoda Areal - Pjesa 603 :Karakteristikat nominale të instrumenteve (mikroskopët interferometrik me interval faze) pa kontakt (ISO 25178-603:2013)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013)
ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
Life cycle
NOW
PUBLISHED SSH EN ISO 25178-603:2013 60.60
Standard published 21 maj 2014