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SSH EN ISO 25178-603:2013

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013)

May 21, 2014

General information

60.60     May 21, 2014

DPS

DPS/KT 12

European Norm

17.040.20  

English  

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Scope

ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

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PUBLISHED
SSH EN ISO 25178-603:2013
60.60 Standard published
May 21, 2014

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Adopted from EN ISO 25178-603:2013