SSH EN 62047-9:2011

Pajisje gjysëmpërçuese - Pajisje mikro-elektromekanike - Pjesa 9: Matja e rezistencës së lidhjes së pllakave për sistemet mikroelektro-mekanike (MEMS)

Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS

Scope

IEC 62047-9:2011 describes bonding strength measurement method of wafer to wafer bonding, type of bonding process such as silicon to silicon fusion bonding, silicon to glass anodic bonding, etc., and applicable structure size during MEMS processing/assembly. The applicable wafer thickness is in the range of 10 ohmm to several millimeters. The contents of the corrigendum of March 2012 have been included in this copy.