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Semiconductor devices - Micro-electromechanical devices - Part 52: Biaxial tensile testing method for stretchable MEMS
40.99 Full report circulated: DIS approved for registration as FDIS
Semiconductor devices - Micro-electromechanical devices - Part 54: Measurement method of tensile strength of microstructures
20.99 WD approved for registration as CD
Semiconductor devices - Micro-electromechanical devices - Part 55: Silicon based MEMS fabrication technology - Test method of microstructure pendulum impact
20.99 WD approved for registration as CD
Semiconductor devices - Micro-electromechanical devices - Part 56: Test method for characteristics of MEMS metal oxide semiconductor (MOS) type gas sensor
30.99 CD approved for registration as DIS
Micro-electromechanical systems - Part 57: RF MEMS directional coupler
20.99 WD approved for registration as CD
Micro-electromechanical systems-Part 58: Test methods for performances of MEMS thermopile devices
20.99 WD approved for registration as CD
Micro-electromechanical systems-Part 59: Test methods for performances of MEMS multi-orifice balanced differential pressure flowmeter
20.99 WD approved for registration as CD
Micro-electromechanical systems - Part 60: Test methods for sensing performances of MEMS resonant electric-field-sensitive devices
20.99 WD approved for registration as CD
Micro-electromechanical systems - Part 61: Evaluation methods of localized deformation and stretchability for Hybrid MEMS materials
20.99 WD approved for registration as CD
Semiconductor devices - Micro-electromechanical systems - Part 62: Electrical resistance test method for hybrid MEMS materials under combined tensile and torsional deformation
20.99 WD approved for registration as CD
Electricity metering equipment - General requirements, tests and test conditions - Part 11: Metering equipment
30.60 Close of voting/ comment period
Accuracy test method for static electricity meters under dynamic load conditions
20.99 WD approved for registration as CD
Electricity metering equipment - Particular requirements - Part 21: Static meters for AC active energy (classes 0,5, 1 and 2)
30.60 Close of voting/ comment period
Electricity metering equipment - Particular requirements - Part 22: Static meters for AC active energy (classes 0,1S, 0,2S and 0,5S)
30.60 Close of voting/ comment period
Electricity metering equipment - Particular requirements - Part 23: Static meters for reactive energy (classes 2 and 3)
30.60 Close of voting/ comment period
Electricity metering equipment - Particular requirements - Part 24: Static meters for fundamental component reactive energy (classes 0,5S, 1S, 1, 2 and 3)
30.60 Close of voting/ comment period
Electricity metering equipment - Particular requirements - Part 26: Static revenue grade sub-meters for AC active energy (classes 0,5, 1, 2) and fundamental component reactive energy (classes 0,5S, 1S, 1, 2 and 3)
20.99 WD approved for registration as CD
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