Published
Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.
PUBLISHED
ISO 3530:1979
90.93
Standard confirmed
Nov 12, 2021
Vacuum technology — Mass-spectrometer-type leak-detector calibration
60.60 Standard published
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