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ISO 3530:1979

Vacuum technology — Mass-spectrometer-type leak-detector calibration

Sep 1, 1979

General information

90.93     Nov 12, 2021

ISO

ISO/TC 135/SC 6

International Standard

23.160  

French   English  

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Published

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Scope

Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.

Life cycle

NOW

PUBLISHED
ISO 3530:1979
90.93 Standard confirmed
Nov 12, 2021

National adoptions

SSH ISO 3530:1979  
DPS

Vacuum technology — Mass-spectrometer-type leak-detector calibration

60.60 Standard published

DPS/KT 138 more