SSH ISO 3530:1979

Vacuum technology — Mass-spectrometer-type leak-detector calibration

Publication date: Jun 17, 2021

General information

Current stage: 60.60 Effective date: Jun 17, 2021

Originator: DPS

Owner: DPS/KT 138

Type: International Standard

ICS: 23.160

Languages: English

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Status: Published

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Paper - ALL 2,677

CD - ALL 2,677

PDF and Paper - ALL 5,354

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Scope

Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.

Life cycle

PREVIOUSLY

WITHDRAWN
DS ISO/TS 13530:2009

NOW

PUBLISHED
SSH ISO 3530:1979
60.60 Standard published
Jun 17, 2021

SSH ISO 3530:1979

Vacuum technology — Mass-spectrometer-type leak-detector calibration

General information

Buying

Scope

Life cycle

PREVIOUSLY

NOW

Related project

Adopted from ISO 3530:1979