ISO/AWI 17470

Microbeam analysis — Electron probe microanalysis — Guidelines for qualitative point analysis by wavelength dispersive X-ray spectrometry

Scope

ISO 17470:2014 gives guidance for the identification of elements and the investigation of the presence of specific elements within a specific volume (on a μm3 scale) contained in a specimen, by analysing X-ray spectra obtained using wavelength dispersive X-ray spectrometers on an electron probe microanalyser or on a scanning electron microscope.