DPS
Drejtoria e Përgjithshme e Standardizimit

0 Produkte

Tel/Cel: +355 4 222 62 55
E-mail: info@dps.gov.al
Adresa: Rr.: "Reshit Collaku", (pranë ILDKPKI, kati VI), Kutia Postare 98, Tiranë - Shqipëri

Main menu

ISO/FDIS 19383

Atomic layer deposition — Chemical characteristics and related process specifications of atomic layer deposition precursors

General information

Current stage: 50.00 Effective date: 3 dhj 2025

Originator: ISO

Owner: ISO/TC 107

Type: International Standard

ICS: 25.220.01

Scope

This document describes the chemical characteristics and related process specifications of the atomic layer deposition precursors, including assay content, metal purity, and anion content specification.

Life cycle

NOW

IN_DEVELOPMENT
ISO/FDIS 19383
50.00 Final text received or FDIS registered for formal approval
3 dhj 2025