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ISO 19383:2026

Atomic layer deposition — Chemical characteristics and related process specifications of atomic layer deposition precursors

Jun 1, 2026

General information

60.60     Jun 1, 2026

ISO

ISO/TC 107

International Standard

25.220.01  

English  

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Scope

This document defines the chemical characteristics and related process specifications of atomic layer deposition precursors, including assay content, metal purity and anion content specification.

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PUBLISHED
ISO 19383:2026
60.60 Standard published
Jun 1, 2026