ISO 18114:2021

Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials

Publication date: 11 maj 2021

General information

Current stage: 90.20 Effective date: 15 pri 2026

Originator: ISO

Owner: ISO/TC 201/SC 6

Type: International Standard

ICS: 71.040.40

Gjuha: anglisht

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Statusi: Publikuar

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Scope

This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.
The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO 18114:2003

NOW

PUBLISHED
ISO 18114:2021
90.20 Standard under periodical review
15 pri 2026

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