Publikuar
This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.
PUBLISHED
ISO/TS 22933:2022
60.60
Standard published
1 pri 2022
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