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ISO/TS 22933:2022

Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS

Apr 1, 2022

General information

90.20     Apr 15, 2025

ISO

ISO/TC 201/SC 6

Technical Specification

71.040.40  

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This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

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PUBLISHED
ISO/TS 22933:2022
90.20 Standard under periodical review
Apr 15, 2025

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