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ISO/TR 15969:2001

Surface chemical analysis — Depth profiling — Measurement of sputtered depth
31 maj 2001
95.99 Withdrawal of Standard   17 mar 2021

General information

95.99     17 mar 2021

ISO

ISO/TC 201/SC 4

Technical Report

71.040.40  

anglisht  

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Scope

This Technical Report gives guidelines for measuring the sputtered depth in sputtered depth profiling. The methods
of sputtered depth measurement described in this Technical Report are applicable to techniques of surface
chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a
typical sputtered depth of up to severalmicrometres.

Life cycle

NOW

WITHDRAWN
ISO/TR 15969:2001
95.99 Withdrawal of Standard
17 mar 2021

REVISED BY

PUBLISHED
ISO/TR 15969:2021