ISO/TR 15969:2001

Surface chemical analysis — Depth profiling — Measurement of sputtered depth

95.99 Withdrawal of Standard Mar 17, 2021

General information

Current stage: 95.99 Effective date: Mar 17, 2021

Originator: ISO

Owner: ISO/TC 201/SC 4

Type: Technical Report

ICS: 71.040.40

Scope

This Technical Report gives guidelines for measuring the sputtered depth in sputtered depth profiling. The methods
of sputtered depth measurement described in this Technical Report are applicable to techniques of surface
chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a
typical sputtered depth of up to severalmicrometres.

Life cycle

NOW

WITHDRAWN
ISO/TR 15969:2001
95.99 Withdrawal of Standard
Mar 17, 2021

REVISED BY

PUBLISHED
ISO/TR 15969:2021

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