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IEC 62047-64 ED1

Semiconductor devices - Micro-electromechanical devices - Part 64: Test methods of Terahertz sensing antenna-coupled MEMS bolometer

General information

20.99     26 qer 2026

CD    22 jan 2027

IEC

TC 47/SC 47F

International Standard

31.080.99  

Scope

Life cycle

NOW

IN_DEVELOPMENT
IEC 62047-64 ED1
20.99 WD approved for registration as CD
26 qer 2026