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PNW 47F-552 ED1

Semiconductor devices - Micro-electromechanical devices - Part 64: Test methods of Terahertz sensing antenna-coupled MEMS bolometer

General information

10.20     Mar 27, 2026

PRVN    Jun 19, 2026

IEC

TC 47/SC 47F

International Standard

Life cycle

NOW

IN_DEVELOPMENT
PNW 47F-552 ED1
10.20 New project ballot initiated
Mar 27, 2026