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IEC 62047-62 ED1

Semiconductor devices - Micro-electromechanical systems - Part 62: Electrical resistance test method for hybrid MEMS materials under combined tensile and torsional deformation

General information

20.99     7 nën 2025

CD    26 qer 2026

IEC

TC 47/SC 47F

International Standard

31.080.99  

Scope

Life cycle

NOW

IN_DEVELOPMENT
IEC 62047-62 ED1
20.99 WD approved for registration as CD
7 nën 2025