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IEC 62047-62 ED1

Semiconductor devices - Micro-electromechanical systems - Part 62: Electrical resistance test method for hybrid MEMS materials under combined tensile and torsional deformation

General information

20.99     Nov 7, 2025

CD    Jun 26, 2026

IEC

TC 47/SC 47F

International Standard

31.080.99  

Life cycle

NOW

IN_DEVELOPMENT
IEC 62047-62 ED1
20.99 WD approved for registration as CD
Nov 7, 2025