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PNW 47F-522 ED1

Semiconductor devices - Micro-electromechanical systems - Part 62: Electrical resistance test method for hybrid MEMS materials under combined tensile and torsional deformation

General information

10.20     Sep 5, 2025

PRVN    Oct 31, 2025

IEC

TC 47/SC 47F

International Standard

Life cycle

NOW

IN_DEVELOPMENT
PNW 47F-522 ED1
10.20 New project ballot initiated
Sep 5, 2025