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IEC 63567-3 ED1

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 3: Nano-scale wafer surface inspection method using UV light

General information

40.00     24 korr 2026

CCDV    11 sht 2026

IEC

TC 47

International Standard

31.080.99  

Scope

Life cycle

NOW

IN_DEVELOPMENT
IEC 63567-3 ED1
40.00 DIS registered
24 korr 2026