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IEC 63567-3 ED1

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 3: Nano-scale wafer surface inspection method using UV light

General information

20.99     Oct 25, 2024

CD    Jul 31, 2025

IEC

TC 47

International Standard

31.080.99  

Life cycle

NOW

IN_DEVELOPMENT
IEC 63567-3 ED1
20.99 WD approved for registration as CD
Oct 25, 2024