DPS
Drejtoria e Përgjithshme e Standardizimit
Tel/Cel: +355 4 222 62 55
E-mail: info@dps.gov.al
Adresa: Rr.: "Reshit Collaku", (pranë ILDKPKI, kati VI), Kutia Postare 98, Tiranë - Shqipëri
Main menu

IEC 63567-1 ED1

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 1: Transmittance evaluation method of EUV pellicle

General information

30.99     13 qer 2025

TCDV    31 korr 2025

IEC

TC 47

International Standard

31.080.99  

Scope

Life cycle

NOW

IN_DEVELOPMENT
IEC 63567-1 ED1
30.99 CD approved for registration as DIS
13 qer 2025