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IEC 63567-1 ED1

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 1: Transmittance evaluation method of EUV pellicle

General information

40.60     13 mar 2026

IEC

TC 47

International Standard

31.080.99  

Scope

Life cycle

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IN_DEVELOPMENT
IEC 63567-1 ED1
40.60 Close of voting
13 mar 2026