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IEC 63567-1 ED1

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 1: Transmittance evaluation method of EUV pellicle

General information

30.99     Jun 13, 2025

TCDV    Jul 31, 2025

IEC

TC 47

International Standard

31.080.99  

Life cycle

NOW

IN_DEVELOPMENT
IEC 63567-1 ED1
30.99 CD approved for registration as DIS
Jun 13, 2025