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IEC 63567-1 ED1

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 1: Transmittance evaluation method of EUV pellicle

General information

50.00     Aug 14, 2026

RFDIS    Sep 4, 2026

IEC

TC 47

International Standard

31.080.99  

Life cycle

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IN_DEVELOPMENT
IEC 63567-1 ED1
50.00 Final text received or FDIS registered for formal approval
Aug 14, 2026