DPS
Drejtoria e Përgjithshme e Standardizimit
0 Items
My account
E-albania
Phone: +355 4 222 62 55
E-mail: info@dps.gov.al
Address: Address: "Reshit Collaku" Str., (nearby ILDKPKI, VI floor), Po.Box 98, Tiranë - Albania
Main menu

IEC 63567-1 ED1

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 1: Transmittance evaluation method of EUV pellicle

General information

30.60     Nov 1, 2024

IEC

TC 47

International Standard

31.080.99  

Life cycle

NOW

IN_DEVELOPMENT
IEC 63567-1 ED1
30.60 Close of voting/ comment period
Nov 1, 2024