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IEC 62047-45 ED1

Semiconductor devices - Micro-electromechanical devices - Part 45: Silicon based MEMS fabrication technology - Measurement method of impact resistance of nanostructures

General information

50.00     13 maj 2024

CFDIS    5 gush 2024

IEC

TC 47/SC 47F

International Standard

31.080.99  

Scope

Life cycle

NOW

IN_DEVELOPMENT
IEC 62047-45 ED1
50.00 Final text received or FDIS registered for formal approval
13 maj 2024