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IEC 62047-45 ED1

Semiconductor devices - Micro-electromechanical devices - Part 45: Silicon based MEMS fabrication technology - Measurement method of impact resistance of nanostructures

General information

50.00     May 13, 2024

CFDIS    Aug 5, 2024

IEC

TC 47/SC 47F

International Standard

31.080.99  

Life cycle

NOW

IN_DEVELOPMENT
IEC 62047-45 ED1
50.00 Final text received or FDIS registered for formal approval
May 13, 2024