Publikuar
This document establishes typical assessment processes to determine grading levels of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category), and provides a protocol to include test methods, analysis and time-weighted factors for their determination.
WITHDRAWN
SSH EN ISO 14644-8:2013
PUBLISHED
SSH EN ISO 14644-8:2022
60.60
Standard published
31 tet 2023