Dhoma me ajër të filtruar dhe mjediset e kontrolluara që lidhen me to - Pjesa 15: Vlerësimi i përshtatshmërisë për përdorimin e pajisjeve dhe materialeve nga përqëndrimi kimik i grimcave në ajër (ISO 14644-15:2017)
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)
ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644‑8).
The following are outside the scope of ISO 14644-15:2017:
- health and safety requirements;
- compatibility with cleaning agents and techniques;
- cleanability;
- biocontamination;
- specific requirements of equipment and materials for processes and products;
- design details of equipment.
Life cycle
NOW
PUBLISHED SSH EN ISO 14644-15:2017 60.60
Standard published 23 jan 2018
English