SSH EN 62047-21:2014

Pajisje gjysëmpërçuese - Pajisje mikroelektromekanike - Pjesa 21: Metoda e provës për koeficientin Poisson të materialeve të sistemeve mikroelektromekanike, MEMS me fletë të holla

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

Publication date: 13 maj 2015

General information

Current stage: 60.60 Effective date: 9 jan 2015

Originator: DPS

Owner: DPS/KT 7

Type: European Norm

ICS: 31.080.99

Gjuha: anglisht

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Statusi: Publikuar

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IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.

SSH EN 62047-21:2014

Pajisje gjysëmpërçuese - Pajisje mikroelektromekanike - Pjesa 21: Metoda e provës për koeficientin Poisson të materialeve të sistemeve mikroelektromekanike, MEMS me fletë të holla

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

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Adopted from EN 62047-21:2014