SSH EN 62374-1:2010

Pajisje gjysëmpërçuese - Pjesa 1: Prova e shpimit të dielektrikut në varësi të kohës (TDDB) për shtresat metalike të jashtëme

Semiconductor devices - Part 1: Time-dependent dielectric breakdown (TDDB) test for inter-metal layers

Publication date: 27 maj 2011

General information

Current stage: 60.60 Effective date: 27 maj 2011

Originator: DPS

Owner: DPS/KT 7

Type: European Norm

ICS: 31.080

Gjuha: anglisht

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Statusi: Publikuar

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Scope

IEC 62374-1:2010 describes a test method, test structure and lifetime estimation method of the time-dependent dielectric breakdown (TDDB) test for inter-metal layers applied in semiconductor devices.

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PUBLISHED
SSH EN 62374-1:2010
60.60 Standard published
27 maj 2011

Related project

Adopted from EN 62374-1:2010

Adopted from IEC 62374-1 Ed. 1.0 b

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