ISO/TR 19319:2013

Surface chemical analysis — Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

Publication date: Mar 6, 2013

General information

Current stage: 60.60 Effective date: Mar 6, 2013

Originator: ISO

Owner: ISO/TC 201/SC 2

Type: Technical Report

ICS: 71.040.40

Languages: English

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Status: Published

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Scope

ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

Life cycle

PREVIOUSLY

Revises
ISO/TR 19319:2003

NOW

PUBLISHED
ISO/TR 19319:2013
60.60 Standard published
Mar 6, 2013

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