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ISO 20341:2003

Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials

Jul 24, 2003

General information

90.60     Mar 5, 2025

ISO

ISO/TC 201/SC 6

International Standard

71.040.40  

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Scope

ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.
It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.

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PUBLISHED
ISO 20341:2003
90.60 Close of review
Mar 5, 2025