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IEC/IEEE 62659:2015 ED1

Nanomanufacturing - Large scale manufacturing for nanoelectronics

Sep 30, 2015

General information

60.60     Sep 30, 2015

IEC

TC 113

International Standard

07.030     07.120     25.020  

English  

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Scope

IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.

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PUBLISHED
IEC/IEEE 62659:2015 ED1
60.60 Standard published
Sep 30, 2015

REVISED BY

IN_DEVELOPMENT
IEC/IEEE 62659 ED2