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SSH ISO 11938:2023

Microbeam analysis — Electron probe microanalysis — Methods for elemental-mapping analysis using wavelength-dispersive spectroscopy

Oct 31, 2023

General information

60.60     Oct 31, 2023

95.99   

DPS

DPS/KT 302

International Standard

71.040.50  

English  

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Scope

This International Standard provides procedures for electron microprobe elemental-mapping analysis using
wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving digitally
across the specimen (electron beam mapping) and mapping with stage movement only (large-area mapping) is
assessed. It describes five types of data processing: the raw X‑ray intensity data method, the k‑value method,
the calibration method, the correlation method and the matrix correction method.

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PUBLISHED
SSH ISO 11938:2023
60.60 Standard published
Oct 31, 2023

Related project

Adopted from ISO 11938:2012