ISO/AWI 26665

Microbeam analysis--Preparation of sectional specimens for metallic materials using focused ion beam

Scope

This document specifies the equipment, sample pretreatment, preparation conditions, and procedures of preparing sectional specimens by using focused ion beam (FIB) technique. This document applies to the preparation of sectional specimens of metal materials, including substrates, surface coatings, and corrosion layers. Other materials may refer to this document for guidance.