ISO/NP 26629

Surface chemical analysis — Atomic force microscopy — Determination of roughness at the nanometre scale by atomic force microscopy

Scope

This standard describes a quantitative method for determining nanometre-scale roughness using atomic force microscopy. It describes procedures for quantitatively determining actual roughness using multiple probes with different tip curvatures. This method targets the roughness ranging from ca 100 pm to 50 nm, which can be measured with conventional probes commonly used in atomic force microscopes. It also describes how the lower measurement limit is determined due to instrument noise.