ISO/AWI 26317

Surface chemical analysis — General procedures — Guideline of alignment procedure foridentical location analysis between different microscopic measuring instruments

Scope

This standard specifies the procedure for analyzing the same part of a material when measuring
the same material with multiple different microscopic measuring instruments. This standard aims
to show analysts the necessary procedures for analyzing the same part of a microscopic region
of the same sample using a sample holder engraved with alignment markers as reference points
shared by multiple microscopic measuring instruments. It applies to instruments capable of
microscopic measurement with a spatial resolution ranging from sub-micron to approximately 10
μm, and with a field of view of approximately 100 μm or more. This standard does not apply to
microscopic measuring instruments that cannot read the position coordinates of the sample
movement stage and cannot specify the address of the analysis part based on the alignment
marker. This standard applies to alignment on a two-dimensional plane, not to three-dimensional
alignment.