ISO/CD 18115-4

Surface chemical analysis — Vocabulary — Part 4: Part 4: Terms used in Total Reflection X-ray Fluorescence (TXRF)

Scope

This International Standard defines terms for surface chemical analysis. Part four covers the terms related to the technique of total reflection x-ray fluorescence, extending the standard. ISO 18115-1 covers general terms and those used in spectroscopy, ISO 18115-2 terms used in scanning-probe microscopy and 18115-3 focuses on optical interface analysis including ellipsometry, Raman and nonlinear optical techniques.