00.00 4 tet 2022
ISO
ISO/TC 213
International Standard
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
Revises
ISO 25178-607:2019
IN_DEVELOPMENT
ISO/PWI 25178-607
00.00
Proposal for new project received
4 tet 2022
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