ISO 21360-6:2023

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps

Publication date: 6 dhj 2023

General information

Current stage: 60.60 Effective date: 6 dhj 2023

Originator: ISO

Owner: ISO/TC 112

Type: International Standard

ICS: 23.160

Gjuha: anglisht

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Statusi: Publikuar

PDF - 7 350 Lekë

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Scope

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.
It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

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PUBLISHED
ISO 21360-6:2023
60.60 Standard published
6 dhj 2023